Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 7, 2018
Patent Application Number
15425589
Date Filed
February 6, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
A vertical fuse element, including, a conductive silicide base on a surface of a substrate, and a conductive silicide pillar extending in a direction perpendicular to the surface of the substrate, where the conductive silicide pillar is on the conductive silicide base, and wherein the conductive silicide pillar includes an upper portion having a width, W5, a base having a width, W6, and a neck region having a width, W7, where W7<W5, and W7≤W6.
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