Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 18, 2019
Patent Application Number
15623561
Date Filed
June 15, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition comprising a base polymer and a sulfonium or iodonium salt of iodized benzoyloxy-containing fluorinated sulfonic acid offers a high sensitivity and minimal LWR or improved CDU independent of whether it is of positive or negative tone.
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