Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yukihiro Abe0
Kazunari Ooyama0
Takanori Ueno0
Yasuo Kojima0
Hironori Owaki0
Jun Ohira0
Date of Patent
July 2, 2019
0Patent Application Number
161205630
Date Filed
September 4, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An average value of a hydrogen content ratio of a surface layer made of hydrogenated amorphous carbon is set to be 0.40 or less and a maximum value of an sp2 bonding ratio in an outermost surface region of the surface layer made of the hydrogenated amorphous carbon is set to be 0.50 or less.
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