US Patent 10340193 Fin field effect transistor and manufacturing method thereof

A fin field-effect transistor is provided. The fin field-effect transistor includes a substrate, a fin structure, a gate-stacked structure, and an isolation structure. The fin structure is disposed on the substrate, and the gate-stacked structure covers the fin structure. The isolation structure disposed on the substrate to isolate the gate-stacked structure from the substrate has different thicknesses in different portions.