Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andrew M. Greene0
Siva Kanakasabapathy0
Ekmini Anuja De Silva0
Date of Patent
July 9, 2019
0Patent Application Number
158418870
Date Filed
December 14, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Semiconductor devices and methods of forming the same include forming gate stacks across a semiconductor fin, each gate stack having a gate conductor. An interlayer dielectric is formed between the gate stacks. A protective layer is formed on the interlayer dielectric that leaves the gate stacks exposed. The gate conductor of at least one gate stack is etched away. A dielectric liner is formed in a gap left by the etched gate conductor.
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