Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kirill V. Shcheglov0
Yingxiang Cheng0
Nolan F. Maggipinto0
Date of Patent
July 16, 2019
0Patent Application Number
153375720
Date Filed
October 28, 2016
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A MEMS accelerometer incorporating a metrology element to directly measure minute changes in measurement baseline. In particular, the MEMS accelerometer incorporates a metrology bar (MB). Embodiments also relate to stress isolation into the sensor design to isolate the sensitive areas of the chip (i.e., the metrology baseline and the proof mass mounting points) from outside stress.
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