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US Patent 11703521 MEMS vibrating beam accelerometer with built-in test actuators

Patent 11703521 was granted and assigned to Honeywell on July, 2023 by the United States Patent and Trademark Office.

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An example system comprising: a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising: a proof mass; and a first resonator mechanically coupled to the proof mass; a first electrode configured to apply a force to the proof mass.

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