Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takuya Matsuda0
Aya Watase0
Kaori Deura0
Masayuki Tanaka0
Takahiro Terada0
Date of Patent
July 30, 2019
0Patent Application Number
146431650
Date Filed
March 10, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe.
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