Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 30, 2019
Patent Application Number
15826889
Date Filed
November 30, 2017
Patent Citations
Patent Primary Examiner
Patent abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
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