Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 2, 2018
Patent Application Number
15155462
Date Filed
May 16, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
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