Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven M. Shank0
Bruce W. Porth0
Solomon Assefa0
Date of Patent
January 14, 2020
0Patent Application Number
161611780
Date Filed
October 16, 2018
0Patent Citations
Patent Primary Examiner
Patent abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
