Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven M. Shank0
Bruce W. Porth0
Solomon Assefa0
Date of Patent
March 23, 2021
0Patent Application Number
166621700
Date Filed
October 24, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
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