US Patent 10396156 Method for FinFET LDD doping
Is a
Date Filed
January 29, 2018
0
Date of Patent
August 27, 2019
0
Patent Application Number
15882285
0
Patent Inventor Names
Cheng-Yi Peng
0
Wei-Yang Lee
0
Ya-Yun Cheng
0
Yen-Ming Chen
0
Chun Hsiung Tsai
0
Jian-Hao Chen
0
Kuo-Feng Yu
0
Shahaji B. More
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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