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US Patent 10396206 Gate cut method
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Patent
Date Filed
July 7, 2017
Date of Patent
August 27, 2019
Patent Application Number
15643940
Patent Citations
US Patent 10229854 FinFET gate cut after dummy gate removal
US Patent 10090169 Methods of forming integrated circuit structures including opening filled with insulator in metal gate
US Patent 10236213 Gate cut structure with liner spacer and related method
US Patent 10056469 Gate cut integration and related device
US Patent 10083874 Gate cut method
Patent Citations Received
US Patent 12107014 Nanosheet transistors with self-aligned gate cut
0
US Patent 11557660 Method and device for forming cut-metal-gate feature
US Patent 10950713 Method and device for forming cut-metal-gate feature
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10396206
Patent Primary Examiner
Sophia T Nguyen
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