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US Patent 10411769 Signal generation method and signal generation device

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
March 15, 2018
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Date of Patent
September 10, 2019
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Patent Application Number
15921807
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Patent Citations Received
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 11972928 Method and system for plasma processing arc suppression
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US Patent 12002611 High power low frequency coils
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US Patent 12027351 Plasma non-uniformity detection
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US Patent 11521832 Uniformity control for radio frequency plasma processing systems
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US Patent 11527385 Systems and methods for calibrating capacitors of matching networks
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US Patent 11539408 Signal generation method and signal generation device
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US Patent 11574799 Arc suppression device for plasma processing equipment
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US Patent 10965353 Signal generation method and signal generation device
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US Patent 11605527 Pulsing control match network
•••
Patent Inventor Names
Yutaka Murakami
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Mikihiro Ouchi
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Tomohiro Kimura
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10411769
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Patent Primary Examiner
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Khanh C Tran
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