Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kirkwood Rough0
Aaron Cuttino0
Date of Patent
June 4, 2024
0Patent Application Number
170066930
Date Filed
August 28, 2020
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A coil having a coil body and a plurality of concentric cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire. Also, a coil for a plasma processing device, the coil having a coil body and a plurality of concentric cylindrical cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire and a diameter to length ratio of between about 2:1 and about 3:1.
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