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US Patent 12002611 High power low frequency coils

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
August 28, 2020
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Date of Patent
June 4, 2024
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Patent Application Number
17006693
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Patent Citations
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US Patent 10026595 Apparatus for frequency tuning in a RF generator
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US Patent 10217618 Current threshold response mode for arc management
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US Patent 10224184 System and method for control of high efficiency generator source impedance
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US Patent 10224186 Plasma source device and methods
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US Patent 10263577 Gate drive circuit and method of operating the same
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US Patent 10269540 Impedance matching system and method of operating the same
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US Patent 10314156 Switching amplifier
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US Patent 10332730 Method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes
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US Patent 10340879 Switching circuit
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US Patent 10373811 Systems and methods for single magnetron sputtering
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•••
Patent Inventor Names
Kirkwood Rough
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Aaron Cuttino
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12002611
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Patent Primary Examiner
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Tuyen T Nguyen
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CPC Code
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H01F 37/005
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H01F 5/00
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H01J 37/321
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H01J 37/3211
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H01J 37/32183
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H05H 1/24
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H01F 27/006
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H01F 27/2828
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H01F 41/064
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H01F 27/325
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