US Patent 10431494 BEOL self-aligned interconnect structure

An interconnect structure is provided that includes an interconnect level that contains an interconnect dielectric material layer having a first electrically conductive via feature, an electrically conductive line feature, and a second electrically conductive via feature embedded in the interconnect dielectric material layer, wherein the first and second via features are self-aligned perpendicularly to, and along the direction of, the electrically conductive line feature.