Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 1, 2019
Patent Application Number
15910390
Date Filed
March 2, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
A MEMS device includes a membrane and a counter electrode structure spaced apart from the membrane. The counter electrode structure includes a non-planar conductive layer. The MEMS device includes an air gap between the membrane and the counter electrode structure. The air gap has a non-uniform thickness.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
