US Patent 10443129 Epitaxial growth device
Patent 10443129 was granted and assigned to Applied Materials on October, 2019 by the United States Patent and Trademark Office.
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Patent abstract
An epitaxial growth device comprises a reaction chamber defined by a substrate setting portion, a ceiling board and a sidewall portion, a heating member and reactant gas-introduction member. The ceiling board is fixed to a ring-like support portion having a through-hole as viewed from above. A diameter of the through-hole becomes reduced gradually toward a substrate-side. The ceiling board is fixed to an end portion of the substrate-side of the through-hole.
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
104431290
Date of Patent
October 15, 2019
0Patent Application Number
137621760
Date Filed
February 7, 2013
0Patent Citations Received
Patent Primary Examiner
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Golden AI
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Patent Citations Received
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Patent Citations Received
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
104431290
Date of Patent
October 15, 2019
0Patent Application Number
137621760
Date Filed
February 7, 2013
0Patent Citations Received
Patent Primary Examiner
Edits on 12 Feb, 2022
Golden AI
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Patent citations received
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US Patent 10443129 Epitaxial growth device
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10443129
Date of patent
October 15, 2019
Patent application number
13762176
Date Filed
February 7, 2013
Patent primary examiner
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