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US Patent 10483090 Restricted capacitor switching

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
July 9, 2018
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Date of Patent
November 19, 2019
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Patent Application Number
16029742
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Patent Citations Received
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US Patent 11948775 Combined RF generator and RF solid-state matching network
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US Patent 11521833 Combined RF generator and RF solid-state matching network
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US Patent 11393659 Impedance matching network and method
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US Patent 11398370 Semiconductor manufacturing using artificial intelligence
0
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US Patent 11404246 Nanosecond pulser bias compensation with correction
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US Patent 11430635 Precise plasma control system
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US Patent 11476091 Impedance matching network for diagnosing plasma chamber
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US Patent 11527383 Nanosecond pulser RF isolation for plasma systems
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US Patent 11532457 Precise plasma control system
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US Patent 11545954 Impedance adjustment device
•••
Patent Inventor Names
Tomislav Lozic
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Imran Ahmed Bhutta
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10483090
0
Patent Primary Examiner
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Stephen E. Jones
0

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