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US Patent 10495974 Target feeding system
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Patent
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Date Filed
September 14, 2017
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Date of Patent
December 3, 2019
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Patent Application Number
15704437
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Patent Citations
US Patent 10034362 Plasma-based light source
Patent Citations Received
US Patent 11963285 Target material control in an EUV light source
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US Patent 10959318 X-ray metrology system with broadband laser produced plasma illuminator
US Patent 11497109 EUV light concentrating apparatus and lithography apparatus including the same
Patent Inventor Names
Ming-Hsun Tsai
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10495974
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Patent Primary Examiner
Phillip A Johnston
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