Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ching-Wei Tsai0
Kuo-Cheng Ching0
Chih-Hao Wang0
Kuan-Lun Cheng0
Date of Patent
December 3, 2019
0Patent Application Number
160535890
Date Filed
August 2, 2018
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a substrate, a semiconductor fin, an isolation plug, and an isolation structure. The semiconductor fin is over the substrate. The isolation plug is over the substrate and adjacent to an end of the semiconductor fin. The isolation structure is over the substrate and adjacent to sidewalls of the semiconductor fin and the isolation plug. A top surface of the isolation structure is in a position lower than a top surface of the isolation plug.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.