US Patent 10507991 Vacuum conveyor substrate loading module

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection system is provided that includes a first conveyor module, and a second conveyor module having a movable surface positioned substantially parallel to a movable surface of the first conveyor module, wherein the first conveyor module includes a first section and a second section, the first section having a vacuum unit operable to secure a substrate to a portion of the movable surface in the first section, and the second section is configured to release the substrate from the movable surface.