US Patent 10527830 Off-axis reflective afocal optical relay
Patent 10527830 was granted and assigned to KLA-Tencor on January, 2020 by the United States Patent and Trademark Office.
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Patent abstract
An optical relay system includes four or more reflective optical elements oriented in a tilted configuration. Each of the four or more reflective optical elements is tilted about one of four or more tilt axes. Further, the four or more tilt axes are oriented to correct for aberrations induced by the tilted configuration.
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Patent Inventor Names
Andrew V. Hill0
Gregory R. Brady0
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US Patent 10527830 Off-axis reflective afocal optical relay
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Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10527830
Date of patent
January 7, 2020
Patent application number
15391375
Date Filed
December 27, 2016
Patent primary examiner
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