US Patent 10527830 Off-axis reflective afocal optical relay
Patent 10527830 was granted and assigned to KLA-Tencor on January, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 27, 2016
Date of Patent
January 7, 2020
Patent Applicant
Patent Application Number
15391375
Patent Citations Received
Patent Inventor Names
Gregory R. Brady
0
Andrew V. Hill
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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