Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
John Kevin Shugrue0
Date of Patent
February 18, 2020
0Patent Application Number
154894530
Date Filed
April 17, 2017
0Patent Citations
...
Patent Primary Examiner
Patent abstract
Variable conductance gas distribution systems, reactors and systems including the variable conductance gas distribution systems, and methods of using the variable conductance gas distribution systems, reactors, and systems are disclosed. The variable conductance gas distribution systems allow rapid manipulation of gas-flow conductance through the gas distribution system.
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