Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alan Yang0
Chiung-Min Lin0
Richard Lin0
Yung-Lin Hsu0
Date of Patent
February 18, 2020
0Patent Application Number
158834970
Date Filed
January 30, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In an embodiment an automated material handling system (AMHS) for a semiconductor fabrication facility (FAB) includes: a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer; and a monitoring module configured to: detect a trigger event based on the sensor data, and initiate a remediation action in response to the trigger event.
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