Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cheng-Ho Hung0
Chi-Yuan Chu0
Jen-Ti Wang0
Kuo-Fong Chuang0
Wei-Chih Chen0
Date of Patent
June 21, 2022
0Patent Application Number
167879660
Date Filed
February 11, 2020
0Patent Citations
Patent Primary Examiner
A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.
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