Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 25, 2020
Patent Application Number
15987892
Date Filed
May 23, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a gate electrode disposed on a fin, a gate spacer disposed on the fin and a sidewall of the gate electrode, a source/drain electrode disposed on the fin, and an air pocket structure interposed between the gate spacer and the source/drain electrode. The air pocket structure includes an air gap, a first sidewall, a top sealing, a second sidewall and a bottom sealing. The air gap is enclosed by the first sidewall, the top sealing, the second sidewall and the bottom sealing arranged in a clockwise sequence. The top sealing and the bottom sealing include the same material of an energy removable material.
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