Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Date of Patent
March 10, 2020
Patent Application Number
15548183
Date Filed
December 28, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
Method for performing cleaning treatment on a substrate having a fine pattern provided with a film formed on the surface, comprises: a silylating step of supplying a silylating agent to the surface of the substrate and silylating the surface of the substrate; and a liquid-chemical cleaning step of supplying a cleaning liquid chemical to the surface of the substrate and cleaning the surface of the substrate after, or simultaneously with, the silylating step.
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