US Patent 10591934 Mass flow controller for substrate processing
Patent 10591934 was granted and assigned to Lam Research on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 9, 2018
Date of Patent
March 17, 2020
Patent Applicant
Patent Application Number
15917528
Patent Inventor Names
John Haruff
0
Sudhakar Gopalakrishnan
0
Dennis Smith
0
Peter Reimer
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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