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US Patent 10607813 Synchronized pulsing of plasma processing source and substrate bias

Patent 10607813 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on March, 2020 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
Current Assignee
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10607813
Date of Patent
March 31, 2020
Patent Application Number
16193790
Date Filed
November 16, 2018
Patent Citations Received
‌
US Patent 12125674 Surface charge and power feedback and control using a switch mode bias system
0
‌
US Patent 11462389 Pulsed-voltage hardware assembly for use in a plasma processing system
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US Patent 11476090 Voltage pulse time-domain multiplexing
‌
US Patent 11476145 Automatic ESC bias compensation when using pulsed DC bias
‌
US Patent 11495470 Method of enhancing etching selectivity using a pulsed plasma
‌
US Patent 11508554 High voltage filter assembly
‌
US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
0
‌
US Patent 12111341 In-situ electric field detection method and apparatus
0
...
Patent Primary Examiner
‌
Renan Luque
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