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US Patent 10611628 MEMS isolation platform with three-dimensional vibration and stress isolation

Patent 10611628 was granted and assigned to EPACK, INC. on April, 2020 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Current Assignee

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

106116280

Date of Patent

April 7, 2020

Patent Application Number

153935420

Date Filed

December 29, 2016

Patent Citations Received

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US Patent 12012328 Stress isolated device package and method of manufacture

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US Patent 11692825 Drive and sense stress relief apparatus

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US Patent 11698257 Isotropic attenuated motion gyroscope

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US Patent 11965740 Isotropic attenuated motion gyroscope

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US Patent 11060937 Micromechanical pressure sensor

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US Patent 11686581 Stress-relief MEMS gyroscope

Patent Primary Examiner

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Jose R Diaz

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