Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Volkmar Senz0
Robert Maul0
Tamas Dögei0
Thomas Friedrich0
Arne Dannenberg0
Ferenc Lukacs0
Friedjof Heuck0
Helmut Grutzeck0
...
Date of Patent
July 13, 2021
0Patent Application Number
164884700
Date Filed
February 21, 2018
0Patent Citations
Patent Primary Examiner
Patent abstract
A micromechanical pressure sensor, having—a pressure sensor core including a sensor diaphragm and a cavity developed above the sensor diaphragm; and—a pressure sensor frame; and—a spring element for the mechanical connection of the pressure sensor core to the pressure sensor frame being developed in such a way that a mechanical robustness is maximized and a coupling of stress from the pressure sensor frame into the sensor pressure core is minimized.
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