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US Patent 10615169 Selective deposition of SiN on horizontal surfaces
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Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
Golden AI
edited on 25 Sep, 2022
Infobox
Patent Citations
US Patent 10002787 Staircase encapsulation in 3D NAND fabrication
0
"Entity importer update"
Golden AI
edited on 25 Sep, 2022
Infobox
Is a
Patent
0
Patent Applicant
Lam Research
0
Current Assignee
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
0
Patent Number
10615169
0
Date of Patent
April 7, 2020
0
Patent Application Number
16052401
0
Date Filed
August 1, 2018
0
Patent Citations
US Patent 10002787 Staircase encapsulation in 3D NAND fabrication
0
Patent Primary Examiner
Vu A Vu
0
Edits on 2 Feb, 2022
"Created via: Entity Importer"
Golden AI
created this topic on 2 Feb, 2022
Edits made to:
Infobox
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US Patent 10615169 Selective deposition of SiN on horizontal surfaces
Infobox
Is a
Patent
Patent applicant
Lam Research
Current assignee
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
Patent number
10615169
Date of patent
April 7, 2020
Patent application number
16052401
Date Filed
August 1, 2018
Patent citations
US Patent 10002787 Staircase encapsulation in 3D NAND fabrication
Patent primary examiner
Vu A Vu
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