US Patent 10627655 Monolithic electro-optical modulator having suspended structure
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Patent Number
106276550
Date of Patent
April 21, 2020
0Patent Application Number
163708210
Date Filed
March 29, 2019
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106276550
Date of Patent
April 21, 2020
0Patent Application Number
163708210
Date Filed
March 29, 2019
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US Patent 10627655 Monolithic electro-optical modulator having suspended structure
Infobox
Is a
Patent jurisdiction
Patent number
10627655
Date of patent
April 21, 2020
Patent application number
16370821
Date Filed
March 29, 2019
Patent primary examiner
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