US Patent 10774423 Tunable ground planes in plasma chambers
Patent 10774423 was granted and assigned to Applied Materials on September, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 24, 2014
0
Date of Patent
September 15, 2020
0
Patent Applicant
Patent Application Number
14552273
0
Patent Citations Received
•••
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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