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US Patent 10778209 Pin diode driving circuit and threshold value determination method

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

September 15, 2020

Patent Application Number

16812800

Date Filed

March 9, 2020

Patent Citations

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US Patent 10454453 RF impedance matching network

US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same

US Patent 10455729 Enclosure cooling system

US Patent 10483090 Restricted capacitor switching

US Patent 10026594 RF impedance matching network

...

Patent Citations Received

US Patent 11978612 Plasma processing apparatus

0

Patent Primary Examiner

Lincoln D Donovan

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