US Patent 10790120 Showerhead having a detachable high resistivity gas distribution plate
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Patent Number
107901200
Date of Patent
September 29, 2020
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168002850
Date Filed
February 25, 2020
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US Patent 10790120 Showerhead having a detachable high resistivity gas distribution plate
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10790120
Date of patent
September 29, 2020
Patent application number
16800285
Date Filed
February 25, 2020
Patent citations
Patent primary examiner
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