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US Patent 10804886 High voltage pre-pulsing

Patent 10804886 was granted and assigned to Eagle Harbor Technologies, Inc. on October, 2020 by the United States Patent and Trademark Office.

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US Patent 12111341 In-situ electric field detection method and apparatus
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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
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US Patent 11984306 Plasma chamber and chamber component cleaning methods
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US Patent 11972924 Pulsed voltage source for plasma processing applications
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US Patent 11962304 High voltage pre-pulsing
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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=10804886
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US Patent 11569066 Pulsed voltage source for plasma processing applications
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US Patent 11508554 High voltage filter assembly
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US Patent 11495470 Method of enhancing etching selectivity using a pulsed plasma
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US Patent 11476145 Automatic ESC bias compensation when using pulsed DC bias
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edited on 28 Oct, 2022
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US Patent 11476090 Voltage pulse time-domain multiplexing
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US Patent 11462389 Pulsed-voltage hardware assembly for use in a plasma processing system
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US Patent 11462388 Plasma processing assembly using pulsed-voltage and radio-frequency power
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edited on 17 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10804886

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