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US Patent 10812071 Drive circuit and impedance matching device

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
November 16, 2017
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Date of Patent
October 20, 2020
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Patent Application Number
16461239
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Patent Citations
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US Patent 10026594 RF impedance matching network
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US Patent 10110218 Integrated biasing for pin diode drivers
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US Patent 10217608 Switching circuit for RF currents
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US Patent 10340879 Switching circuit
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US Patent 10431424 Parasitic capacitance compensation circuit
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US Patent 10454453 RF impedance matching network
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US Patent 10431428 System for providing variable capacitance
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US Patent 10455729 Enclosure cooling system
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US Patent 10483090 Restricted capacitor switching
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US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same
Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
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US Patent 11557461 Impedance matching network
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US Patent 11356074 Impedance matching device and impedance matching method
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US Patent 11948775 Combined RF generator and RF solid-state matching network
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US Patent 11521833 Combined RF generator and RF solid-state matching network
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10812071
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Patent Primary Examiner
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Hai L Nguyen
0

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