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US Patent 10854423 Multi-beam particle beam system

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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
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US Patent 11935721 System comprising a multi-beam particle microscope and method for operating the same
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=108544230
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US Patent 11657999 Particle beam system and method for the particle-optical examination of an object
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US Patent 11562881 Charged particle beam system
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edited on 25 Jan, 2023
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US Patent 11562880 Particle beam system for adjusting the current of individual particle beams
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US Patent 11521827 Method of imaging a 2D sample with a multi-beam particle microscope
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Infobox
Is a
Patent
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
108544230
Date of Patent
December 1, 2020
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Patent Application Number
162775720
Date Filed
February 15, 2019
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=108544230
Patent Citations
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US Patent 10176965 Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
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Patent Primary Examiner
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David E Smith
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10854423
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 US Patent 10854423 Multi-beam particle beam system

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10854423
Date of patent
December 1, 2020
Patent application number
16277572
Date Filed
February 15, 2019
Patent citations
‌
US Patent 10176965 Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
Patent primary examiner
‌
David E Smith

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