Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10866197 Dispositioning defects detected on extreme ultraviolet photomasks

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
September 6, 2019
Date of Patent
December 15, 2020
Patent Application Number
16563763
Patent Citations
‌
US Patent 10451563 Inspection of photomasks by comparing two photomasks
‌
US Patent 10241390 Reflective mask blank and process for producing the reflective mask blank
‌
US Patent 10401299 Image capturing apparatus and inspection apparatus and inspection method
‌
US Patent 10634623 Phase contrast monitoring for extreme ultra-violet (EUV) masks defect inspection
Patent Citations Received
‌
US Patent 11675275 Positioning method and apparatus for particles on reticle, storage medium, and electronic device
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10866197
Patent Primary Examiner
‌
Naum Levin

Find more entities like US Patent 10866197 Dispositioning defects detected on extreme ultraviolet photomasks

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo