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US Patent 10867108 Optical mode optimization for wafer inspection

Overview Structured Data Issues Contributors Activity

Is a

Date Filed

January 17, 2019

Date of Patent

December 15, 2020

Patent Application Number

16250128

Patent Citations

US Patent 10599951 Training a neural network for defect detection in low resolution images

US Patent 10338002 Methods and systems for selecting recipe for defect inspection

US Patent 10713534 Training a learning based defect classifier

US Patent 10115040 Convolutional neural network-based mode selection and defect classification for image fusion

US Patent 10267748 Optimizing training sets used for setting up inspection-related algorithms

Patent Citations Received

US Patent 11368158 Methods for handling integrated circuit dies with defects

US Patent 11748551 Optical mode optimization for wafer inspection

US Patent 11347926 Optical mode optimization for wafer inspection

US Patent 11788972 Method of automatically setting optical parameters and automated optical inspection system using the same

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Primary Examiner

Leigh M. Garbowski

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