US Patent 10872747 Controlling showerhead heating via resistive thermal measurements
Patent 10872747 was granted and assigned to Lam Research on December, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 8, 2018
Date of Patent
December 22, 2020
Patent Applicant
Patent Application Number
16058090
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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