US Patent 10875774 Tritertbutyl aluminum reactants for vapor deposition
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Patent Number
108757740
Date of Patent
December 29, 2020
0Patent Application Number
167217100
Date Filed
December 19, 2019
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US Patent 10875774 Tritertbutyl aluminum reactants for vapor deposition
Infobox
Is a
Patent jurisdiction
Patent number
10875774
Date of patent
December 29, 2020
Patent application number
16721710
Date Filed
December 19, 2019
Patent citations
Patent primary examiner
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