US Patent 10876647 Quick release purge valve and substrate container using same
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Patent Number
108766470
Date of Patent
December 29, 2020
0Patent Application Number
162378180
Date Filed
January 2, 2019
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Patent Number
108766470
Date of Patent
December 29, 2020
0Patent Application Number
162378180
Date Filed
January 2, 2019
0Official Website
Patent Citations
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US Patent 10876647 Quick release purge valve and substrate container using same
Infobox
Is a
Patent jurisdiction
Patent number
10876647
Date of patent
December 29, 2020
Patent application number
16237818
Date Filed
January 2, 2019
Patent citations
Patent primary examiner
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