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US Patent 10896845 Airgap vertical transistor without structural collapse
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Patent
Date Filed
June 13, 2019
Date of Patent
January 19, 2021
Patent Application Number
16439880
Patent Citations
US Patent 10395988 Vertical FET transistor with reduced source/drain contact resistance
US Patent 10170588 Method of forming vertical transport fin field effect transistor with high-K dielectric feature uniformity
US Patent 10164104 Method to form air-gap spacers and air-gap spacer-containing structures
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10896845
Patent Primary Examiner
Yasser A Abdelaziez
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