US Patent 10901316 Iodine-containing polymers for chemically amplified resist compositions

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Patent Jurisdiction

Patent Number

Patent Inventor Names

Emad Aqad0

James F. Cameron0

James W. Thackeray0

Date of Patent

January 26, 2021

Patent Application Number

166811420

Date Filed

November 12, 2019

Patent Citations Received

Patent Primary Examiner

Patent abstract

A monomer having formula (I):

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